EU PVSEC Programme Online
EU PVSEC 2020, 7 - 11 September 2020
Presentation: 1CV.3.76 Low Temperature Deposition of Conducting Indium Oxide Films for Solar Cell Applications
Type: Visual
Date: Wednesday, 27th September 2017
15:15 - 16:45
Location / Room: RAI Congress Centre 1st Floor / Poster Area
Author(s): Y. Vygranenko, M. Fernandes, M. Vieira, G. Lavareda, C. Nunes de Carvalho, P. Brogueira, A. Amaral
Presenter / Speaker: M. Fernandes, UNINOVA, Caparica, Portugal
Event: Conference Conference
Session: 1CV.3 Fundamental Studies / New Materials and Concepts for Cells and Modules
Topic: 1. 2 New Materials and Concepts for Cells and Modules
Keywords: Antireflection Coating, ITO, Flexible Substrate, Electrical Properties, Optical Properties
Summary / Abstract: In this contribution, we report on low temperature deposition of conducting indium oxide (In2O3) films by a radio-frequency plasma enhanced reactive thermal evaporation technique. The films were deposited on glass and flexible polyethylene terephthalate substrates without intentional heating of the substrate and at temperatures up to 150 oC. The material stoichiometry was accurately controlled by adjusting the deposition conditions including oxygen flow, process pressure, pumping speed, and rf-power. The Hall effect measurements were performed on the fabricated samples to determine the relation between the deposition conditions and the electrical properties of the films. The resistivity of 4×10-4 Ω-cm was reached under optimized deposition conditions. Coatings on flexible plastic substrates with 16 Ω/sq sheet resistance show an 82% peak value of transmittance in the visible spectral range. The film morphology is also analyzed by scanning electron microscopy (SEM).