EU PVSEC Programme Online
EU PVSEC 2021, 6 - 10 September 2021
Presentation: 2AV.2.22 Innovative Approach to Simultaneous Laser-Doping and Grooving for Improved Plated-Copper Metallisation
Type: Visual
Date: Monday, 14th September 2015
15:15 - 16:45
Location / Room: CCH 2nd Floor / Poster Area Hall G
Author(s): S. Wang, L. Mai, A. Ciesla, Z. Hameiri, C. Chan, B. Hallam, A. Sugianto, C.M. Chong, J. Ji, Z. Shi, S.R. Wenham
Presenter / Speaker: S. Wang, UNSW, Sydney, Australia et al.
Event: Conference Conference
Session: 2AV.2 Silicon Solar Cell Improvements
Type(s) of Access:  Conference Registration
Topic: 2. 2 Silicon Solar Cell Improvements
Keywords: Laser Doping, Laser Damage, Adhesion, Plating, Czochralski (Cz)
Summary / Abstract: Both Buried Contact Solar Cells (BCSC) and Laser Doped Selective Emitter (LDSE) solar cells have shown great success in large-scale manufacturing. Recent studies show that plated contacts can be more durable than screen-printed contacts. A new concept of laser doping with grooving is introduced to form narrow grooves with heavily doped walls in a simultaneous step with the metal contact subsequently formed by plating. This process capitalizes on the benefits of both BCSC and LDSE cells. The width of the groove is only about three to five microns. The narrow width and corresponding steep walls of the groove make it possible to deposit the antireflection coating (ARC) after the laser grooving process such that the groove walls remain uncovered to allow nucleation of subsequent metal plating. Formation of laser-induced defects is minimized because thermal expansion mismatch between the ARC and silicon is avoided during the laser doping process. This structure leads to greatly enhanced adhesion of the plated contact due to it being buried underneath the silicon (Si) surface.